Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500686 | Hot plate and method of manufacturing semiconductor device | Junichi Wada | 2002-12-31 |
| 6462395 | Semiconductor device and method of producing the same | Masatoshi Fukuda, Toshiya Suzuki, Naofumi Nakamura | 2002-10-08 |
| 6440843 | Semiconductor device and method for manufacturing the same | Junichi Wada, Atsuko Sakata, Takamasa Usui, Masahiko Hasunuma, Hideki Shibata +3 more | 2002-08-27 |
| 6436813 | Semiconductor device and method of manufacturing the same | Yasushi Oikawa, Junichi Wada | 2002-08-20 |
| 6423192 | Sputtering apparatus and film forming method | Junichi Wada, Hideto Matsuyama, Atsuko Sakata, Koichi Watanabe | 2002-07-23 |
| 6342131 | Method of depositing a multilayer thin film by means of magnetron sputtering which controls the magnetic field | Viraj Y. Sardesai, Christopher Parks, John Benedict | 2002-01-29 |