Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440843 | Semiconductor device and method for manufacturing the same | Junichi Wada, Atsuko Sakata, Tomio Katata, Takamasa Usui, Hideki Shibata +3 more | 2002-08-27 |
| 6436849 | Method for manufacturing semiconductor device having low dielectric constant insulating film, wafer processing equipment and wafer storing box used in this method | Hideshi Miyajima, Hisashi Kaneko, Rempei Nakata | 2002-08-20 |
| 6414394 | Semiconductor device | Sachiyo Ito | 2002-07-02 |
| 6403462 | Method for manufacturing high reliability interconnection having diffusion barrier layer | Hisashi Kaneko, Shohei Shima, Sachiyo Ito | 2002-06-11 |