Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440843 | Semiconductor device and method for manufacturing the same | Junichi Wada, Tomio Katata, Takamasa Usui, Masahiko Hasunuma, Hideki Shibata +3 more | 2002-08-27 |
| 6423192 | Sputtering apparatus and film forming method | Junichi Wada, Hideto Matsuyama, Tomio Katata, Koichi Watanabe | 2002-07-23 |