Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500686 | Hot plate and method of manufacturing semiconductor device | Tomio Katata | 2002-12-31 |
| 6440843 | Semiconductor device and method for manufacturing the same | Atsuko Sakata, Tomio Katata, Takamasa Usui, Masahiko Hasunuma, Hideki Shibata +3 more | 2002-08-27 |
| 6436813 | Semiconductor device and method of manufacturing the same | Yasushi Oikawa, Tomio Katata | 2002-08-20 |
| 6423192 | Sputtering apparatus and film forming method | Hideto Matsuyama, Tomio Katata, Atsuko Sakata, Koichi Watanabe | 2002-07-23 |