Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458713 | Method for manufacturing semiconductor device | Nobuhide Yamada, Hideshi Miyajima, Motonobu Kawai | 2002-10-01 |
| 6436849 | Method for manufacturing semiconductor device having low dielectric constant insulating film, wafer processing equipment and wafer storing box used in this method | Masahiko Hasunuma, Hideshi Miyajima, Hisashi Kaneko | 2002-08-20 |
| 6419557 | Polishing method and polisher used in the method | Haruki Nojo, Masako Kodera, Nobuo Hayasaka | 2002-07-16 |