Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475285 | Deposition apparatus | Hiroshi Ikegami, Shinichi Ito, Katsuya Okumura | 2002-11-05 |
| 6440843 | Semiconductor device and method for manufacturing the same | Junichi Wada, Atsuko Sakata, Tomio Katata, Takamasa Usui, Masahiko Hasunuma +3 more | 2002-08-27 |
| 6419557 | Polishing method and polisher used in the method | Haruki Nojo, Rempei Nakata, Masako Kodera | 2002-07-16 |
| 6409780 | Water-laden solid matter of vapor-phase processed inorganic oxide particles and slurry for polishing and manufacturing method of semiconductor devices | Hiroyuki Yano, Katsuya Okumura, Akira Iio, Masayuki Hattori, Kiyonobu Kubota | 2002-06-25 |
| 6376894 | Semiconductor device | Hiroshi Ikegami, Keiichi Sasaki | 2002-04-23 |
| 6375545 | Chemical mechanical method of polishing wafer surfaces | Hiroyuki Yano, Gaku Minamihaba, Yukiteru Matsui, Katsuya Okumura, Akira Iio +2 more | 2002-04-23 |
| 6334928 | Semiconductor processing system and method of using the same | Makoto Sekine, Katsuya Okumura | 2002-01-01 |