Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443811 | Ceria slurry solution for improved defect control of silicon dioxide chemical-mechanical polishing | Sumit Pandey, Jeremy Stephens, Ravikumar Ramachandran | 2002-09-03 |
| 6419557 | Polishing method and polisher used in the method | Rempei Nakata, Masako Kodera, Nobuo Hayasaka | 2002-07-16 |