Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6419557 | Polishing method and polisher used in the method | Haruki Nojo, Rempei Nakata, Nobuo Hayasaka | 2002-07-16 |
| 6410439 | Semiconductor polishing apparatus and method for chemical/mechanical polishing of films | Takashi Yoda, Motosuke Miyoshi | 2002-06-25 |