Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495841 | Charged beam drawing apparatus | Atsushi Ando, Shunko Magoshi, Kazuyoshi Sugihara, Yuichiro Yamazaki, Katsuya Okumura +1 more | 2002-12-17 |
| 6414323 | Charged particle beam apparatus and method of controlling charged particle beam | Hideaki Abe, Yuuichiro Yamazaki | 2002-07-02 |
| 6410439 | Semiconductor polishing apparatus and method for chemical/mechanical polishing of films | Masako Kodera, Takashi Yoda | 2002-06-25 |