Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432257 | Dresser for polishing cloth and method for manufacturing such dresser and polishing apparatus | Hiroshi Nagasaka, Momoko Kakutani, Kunio Tateishi, Naoaki Ogure | 2002-08-13 |
| 6410439 | Semiconductor polishing apparatus and method for chemical/mechanical polishing of films | Masako Kodera, Motosuke Miyoshi | 2002-06-25 |