Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6414323 | Charged particle beam apparatus and method of controlling charged particle beam | Yuuichiro Yamazaki, Motosuke Miyoshi | 2002-07-02 |
| 6376136 | Charged beam exposure method | Tetsuro Nakasugi, Yuichiro Yamazaki | 2002-04-23 |
| 6364773 | Torque limiter having cover with internal projecting portions to support forcing member of limiter plate | Susumu Aoki, Hideki Furuuchi | 2002-04-02 |
| 6356484 | Semiconductor memory device | Katsumi Dosaka, Masaki Kumanoya, Yasuhiro Konishi, Katsumitsu Himukashi, Kouji Hayano +4 more | 2002-03-12 |