Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495841 | Charged beam drawing apparatus | Atsushi Ando, Shunko Magoshi, Kazuyoshi Sugihara, Motosuke Miyoshi, Katsuya Okumura +1 more | 2002-12-17 |
| 6376136 | Charged beam exposure method | Tetsuro Nakasugi, Hideaki Abe | 2002-04-23 |