Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495841 | Charged beam drawing apparatus | Atsushi Ando, Kazuyoshi Sugihara, Yuichiro Yamazaki, Motosuke Miyoshi, Katsuya Okumura +1 more | 2002-12-17 |
| 6481004 | Circuit pattern design method, exposure method, charged-particle beam exposure system | Ryoichi Inanami | 2002-11-12 |