Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443811 | Ceria slurry solution for improved defect control of silicon dioxide chemical-mechanical polishing | Haruki Nojo, Sumit Pandey, Jeremy Stephens | 2002-09-03 |
| 6358850 | Slurry-less chemical-mechanical polishing of oxide materials | Laertis Economikos, Sumit Pandey, Ronald J. Schutz | 2002-03-19 |
| 6358855 | Clean method for recessed conductive barriers | Nicolas Nagel, Christopher C. Parks | 2002-03-19 |
| 6350692 | Increased polish removal rate of dielectric layers using fixed abrasive pads | Laertis Economikos, Alexander William Simpson | 2002-02-26 |