Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485355 | Method to increase removal rate of oxide using fixed-abrasive | Laertis Economikos | 2002-11-26 |
| 6350692 | Increased polish removal rate of dielectric layers using fixed abrasive pads | Laertis Economikos, Ravikumar Ramachandran | 2002-02-26 |