Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420267 | Method for forming an integrated barrier/plug for a stacked capacitor | Chenting Lin, Andreas Knorr, Keith Kwong Hon Wong, Hua Shen, Jenny Lian | 2002-07-16 |
| 6358850 | Slurry-less chemical-mechanical polishing of oxide materials | Laertis Economikos, Sumit Pandey, Ravikumar Ramachandran | 2002-03-19 |