Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420267 | Method for forming an integrated barrier/plug for a stacked capacitor | Chenting Lin, Ronald J. Schutz, Andreas Knorr, Keith Kwong Hon Wong, Hua Shen | 2002-07-16 |
| 6420272 | Method for removal of hard mask used to define noble metal electrode | Hua Shen, David E. Kotecki, Satish D. Athavale, Gerhard Kunkel, Nimal Chaudhary | 2002-07-16 |
| 6365328 | Semiconductor structure and manufacturing method | Hua Shen, David E. Kotecki, Satish D. Athavale, Laertis Economikos, Fen F. Jamin +2 more | 2002-04-02 |
| 6339007 | Capacitor stack structure and method of fabricating description | Yun-Yu Wang, Rajarao Jammy, Lee J. Kimball, David E. Kotecki, Chenting Lin +4 more | 2002-01-15 |