Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451508 | Plural interleaved exposure process for increased feature aspect ratio in dense arrays | Scott Bukofsky, Alan C. Thomas | 2002-09-17 |
| 6420272 | Method for removal of hard mask used to define noble metal electrode | Hua Shen, David E. Kotecki, Satish D. Athavale, Jenny Lian, Nimal Chaudhary | 2002-07-16 |
| 6383691 | Photomask and method for increasing image aspect ratio while relaxing mask fabrication requirements | Mihel Seitz | 2002-05-07 |
| 6379869 | Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterning | Uwe Schroeder, Alois Gutmann, Bruno Spuler | 2002-04-30 |
| 6365328 | Semiconductor structure and manufacturing method | Hua Shen, David E. Kotecki, Satish D. Athavale, Jenny Lian, Laertis Economikos +2 more | 2002-04-02 |