Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379869 | Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterning | Uwe Schroeder, Gerhard Kunkel, Alois Gutmann | 2002-04-30 |