Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451508 | Plural interleaved exposure process for increased feature aspect ratio in dense arrays | Scott Bukofsky, Gerhard Kunkel | 2002-09-17 |
| 6436585 | Method of using optical proximity effects to create electrically blown fuses with sub-critical dimension neck downs | Chandrasekhar Narayan, Axel Brintzinger, Fred L. Einspruch, Henning Haffner | 2002-08-20 |
| 6427090 | Requalification controller for durables | John T. Federico, Perry G. Hartswick, Anne Marie Pelella | 2002-07-30 |
| 6420101 | Method of reducing post-development defects in and around openings formed in photoresist by use of non-patterned exposure | Zhijian Lu, Alois Gutmann, Kuang-Jung Chen, Margaret C. Lawson | 2002-07-16 |
| 6372408 | Method of reducing post-development defects in and around openings formed in photoresist by use of multiple development/rinse cycles | Zhijian Lu, Alois Gutmann, Kuang-Jung Chen, Margaret C. Lawson | 2002-04-16 |