Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451490 | Method to overcome image shortening by use of sub-resolution reticle features | William H. Advocate, Christopher Adam Feild, Donald J. Samuels | 2002-09-17 |
| 6451508 | Plural interleaved exposure process for increased feature aspect ratio in dense arrays | Gerhard Kunkel, Alan C. Thomas | 2002-09-17 |
| 6376149 | Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores | Robert D. Grober, Paul Dentinger, James Welch Taylor | 2002-04-23 |