Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428939 | Enhanced bright peak clear phase shifting mask and method of use | Lei Yang, Francesco Cerrina | 2002-08-06 |
| 6376149 | Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores | Robert D. Grober, Scott Bukofsky, Paul Dentinger | 2002-04-23 |