Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440756 | Reduction of plasma charge-induced damage in microfabricated devices | J. Leon Shohet, Cristian Cismaru | 2002-08-27 |
| 6428939 | Enhanced bright peak clear phase shifting mask and method of use | Lei Yang, James Welch Taylor | 2002-08-06 |
| 6375903 | Method and apparatus for synthesis of arrays of DNA probes | Michael R. Sussman, Frederick R. Blattner, Sangeet Singh-Gasson, Roland Green | 2002-04-23 |