Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440756 | Reduction of plasma charge-induced damage in microfabricated devices | J. Leon Shohet, Francesco Cerrina | 2002-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440756 | Reduction of plasma charge-induced damage in microfabricated devices | J. Leon Shohet, Francesco Cerrina | 2002-08-27 |