Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483937 | Process for inspecting an object | — | 2002-11-19 |
| 6451490 | Method to overcome image shortening by use of sub-resolution reticle features | William H. Advocate, Scott Bukofsky, Christopher Adam Feild | 2002-09-17 |
| 6426269 | Dummy feature reduction using optical proximity effect correction | Henning Haffner, Heinz Hoenigschmid | 2002-07-30 |