Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454819 | Composite particles and production process thereof, aqueous dispersion, aqueous dispersion composition for chemical mechanical polishing, and process for manufacture of semiconductor device | Hiroyuki Yano, Gaku Minamihaba, Yukiteru Matsui, Katsuya Okumura, Masayuki Motonari +1 more | 2002-09-24 |
| 6453439 | Pseudo product code encoding and decoding apparatus and method | Kohei Yamamoto | 2002-09-17 |
| 6447695 | Aqueous dispersion composition for chemical mechanical polishing for use in manufacture of semiconductor devices | Masayuki Motonari, Nobuo Kawahashi | 2002-09-10 |
| 6415414 | Encoding apparatus and method, decoding apparatus and method, and providing medium | Jun Murayama | 2002-07-02 |
| 6409780 | Water-laden solid matter of vapor-phase processed inorganic oxide particles and slurry for polishing and manufacturing method of semiconductor devices | Hiroyuki Yano, Nobuo Hayasaka, Katsuya Okumura, Akira Iio, Kiyonobu Kubota | 2002-06-25 |
| 6375545 | Chemical mechanical method of polishing wafer surfaces | Hiroyuki Yano, Gaku Minamihaba, Yukiteru Matsui, Nobuo Hayasaka, Katsuya Okumura +2 more | 2002-04-23 |
| 6360346 | Storage unit, method of checking storage unit, reading and writing method | Toshiyuki Miyauchi | 2002-03-19 |