Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454819 | Composite particles and production process thereof, aqueous dispersion, aqueous dispersion composition for chemical mechanical polishing, and process for manufacture of semiconductor device | Hiroyuki Yano, Gaku Minamihaba, Yukiteru Matsui, Katsuya Okumura, Masayuki Motonari +1 more | 2002-09-24 |
| 6409780 | Water-laden solid matter of vapor-phase processed inorganic oxide particles and slurry for polishing and manufacturing method of semiconductor devices | Hiroyuki Yano, Nobuo Hayasaka, Katsuya Okumura, Masayuki Hattori, Kiyonobu Kubota | 2002-06-25 |
| 6375545 | Chemical mechanical method of polishing wafer surfaces | Hiroyuki Yano, Gaku Minamihaba, Yukiteru Matsui, Nobuo Hayasaka, Katsuya Okumura +2 more | 2002-04-23 |