Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454819 | Composite particles and production process thereof, aqueous dispersion, aqueous dispersion composition for chemical mechanical polishing, and process for manufacture of semiconductor device | Hiroyuki Yano, Gaku Minamihaba, Yukiteru Matsui, Katsuya Okumura, Masayuki Hattori +1 more | 2002-09-24 |
| 6447695 | Aqueous dispersion composition for chemical mechanical polishing for use in manufacture of semiconductor devices | Masayuki Hattori, Nobuo Kawahashi | 2002-09-10 |
| 6375545 | Chemical mechanical method of polishing wafer surfaces | Hiroyuki Yano, Gaku Minamihaba, Yukiteru Matsui, Nobuo Hayasaka, Katsuya Okumura +2 more | 2002-04-23 |