Issued Patents 2002
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495807 | Heat treating method and heat treating apparatus | Hideaki Sakurai, Iwao Higashikawa, Akitoshi Kumagae | 2002-12-17 |
| 6483083 | Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surface | Hideaki Sakurai, Akitoshi Kumagae, Iwao Higashikawa, Tsunetoshi Arikado, Katsuya Okumura | 2002-11-19 |
| 6475285 | Deposition apparatus | Hiroshi Ikegami, Nobuo Hayasaka, Katsuya Okumura | 2002-11-05 |
| 6441351 | Heating device, method for evaluating heating device and pattern forming method | Kei Hayasaki, Kenji Kawano | 2002-08-27 |
| 6434959 | Air conditioner | Kenji Kobayashi, Haruyuki Kaeriyama, Naoki Tsuzurano, Shigetaka Nishino, Takeshi Ogawa | 2002-08-20 |
| 6423977 | Pattern size evaluation apparatus | Kei Hayasaki, Kenji Kawano, Soichi Inoue, Katsuya Okumura | 2002-07-23 |
| 6410080 | Method for forming a liquid film on a substrate | — | 2002-06-25 |
| 6378983 | Digital prepress system | Kazuhisa Nakao, Kozi Tokunaga | 2002-04-30 |
| 6376139 | Control method for exposure apparatus and control method for semiconductor manufacturing apparatus | Tadahito Fujisawa, Soichi Inoue, Kenji Kawano, Ichiro Mori | 2002-04-23 |
| 6372285 | Method of forming liquid film | Katsuya Okumura | 2002-04-16 |
| 6372413 | Method for cleaning the surface of substrate to which residues of resist stick | Tatsuhiko Ema | 2002-04-16 |