Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6376139 | Control method for exposure apparatus and control method for semiconductor manufacturing apparatus | Tadahito Fujisawa, Soichi Inoue, Kenji Kawano, Shinichi Ito | 2002-04-23 |
| 6340542 | Method of manufacturing a semiconductor device, method of manufacturing a photomask, and a master mask | Soichi Inoue, Suigen Kyoh, Iwao Higashikawa | 2002-01-22 |
| 6338035 | Voice input word processor | — | 2002-01-08 |