Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6340542 | Method of manufacturing a semiconductor device, method of manufacturing a photomask, and a master mask | Soichi Inoue, Iwao Higashikawa, Ichiro Mori | 2002-01-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6340542 | Method of manufacturing a semiconductor device, method of manufacturing a photomask, and a master mask | Soichi Inoue, Iwao Higashikawa, Ichiro Mori | 2002-01-22 |