Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495807 | Heat treating method and heat treating apparatus | Hideaki Sakurai, Shinichi Ito, Akitoshi Kumagae | 2002-12-17 |
| 6483083 | Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surface | Hideaki Sakurai, Akitoshi Kumagae, Shinichi Ito, Tsunetoshi Arikado, Katsuya Okumura | 2002-11-19 |
| 6340542 | Method of manufacturing a semiconductor device, method of manufacturing a photomask, and a master mask | Soichi Inoue, Suigen Kyoh, Ichiro Mori | 2002-01-22 |
| 6335145 | Pattern forming method and pattern forming apparatus | Soichi Inoue, Yoji Ogawa, Shigehiro Hara, Kazuko Yamamoto | 2002-01-01 |