Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440616 | Mask and method for focus monitoring | Kyoko Izuha, Tadahito Fujisawa | 2002-08-27 |
| 6423977 | Pattern size evaluation apparatus | Kei Hayasaki, Shinichi Ito, Kenji Kawano, Katsuya Okumura | 2002-07-23 |
| 6376139 | Control method for exposure apparatus and control method for semiconductor manufacturing apparatus | Tadahito Fujisawa, Kenji Kawano, Shinichi Ito, Ichiro Mori | 2002-04-23 |
| 6340542 | Method of manufacturing a semiconductor device, method of manufacturing a photomask, and a master mask | Suigen Kyoh, Iwao Higashikawa, Ichiro Mori | 2002-01-22 |
| 6335145 | Pattern forming method and pattern forming apparatus | Iwao Higashikawa, Yoji Ogawa, Shigehiro Hara, Kazuko Yamamoto | 2002-01-01 |