Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440616 | Mask and method for focus monitoring | Kyoko Izuha, Soichi Inoue | 2002-08-27 |
| 6376139 | Control method for exposure apparatus and control method for semiconductor manufacturing apparatus | Soichi Inoue, Kenji Kawano, Shinichi Ito, Ichiro Mori | 2002-04-23 |