Issued Patents 2002
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6445410 | Image input apparatus having interchangeable image pickup device and pan head | — | 2002-09-03 |
| 6441351 | Heating device, method for evaluating heating device and pattern forming method | Kei Hayasaki, Shinichi Ito | 2002-08-27 |
| 6423977 | Pattern size evaluation apparatus | Kei Hayasaki, Shinichi Ito, Soichi Inoue, Katsuya Okumura | 2002-07-23 |
| 6397332 | Verification data generating apparatus, data verification apparatus and storage medium for storing verification data generating program | Masahiro Taguchi, Kazuo Saito | 2002-05-28 |
| 6377083 | Semiconductor integrated device and methods of detecting and correcting a voltage drop in an integrated circuit | Tsutomu Takabayashi, Shizuo Morizane | 2002-04-23 |
| 6376139 | Control method for exposure apparatus and control method for semiconductor manufacturing apparatus | Tadahito Fujisawa, Soichi Inoue, Shinichi Ito, Ichiro Mori | 2002-04-23 |
| 6362921 | Optical element, holding structure for optical element, and image pickup apparatus | Seiji Iida, Tsukasa Uehara | 2002-03-26 |
| 6340252 | Light-quantity controlling device and apparatus using the same | — | 2002-01-22 |
| 6337772 | Optical element, optical system using optical element, and optical device with optical element | Tsukasa Uehara, Makoto Sekita, Seiji Iida | 2002-01-08 |
| 6337773 | Optical element, jig for holding optical element, and apparatus including optical element | Tsukasa Uehara, Seiji Iida | 2002-01-08 |