Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441351 | Heating device, method for evaluating heating device and pattern forming method | Shinichi Ito, Kenji Kawano | 2002-08-27 |
| 6423977 | Pattern size evaluation apparatus | Shinichi Ito, Kenji Kawano, Soichi Inoue, Katsuya Okumura | 2002-07-23 |