Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495807 | Heat treating method and heat treating apparatus | Shinichi Ito, Iwao Higashikawa, Akitoshi Kumagae | 2002-12-17 |
| 6483083 | Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surface | Akitoshi Kumagae, Iwao Higashikawa, Shinichi Ito, Tsunetoshi Arikado, Katsuya Okumura | 2002-11-19 |