Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483083 | Heat treatment method and a heat treatment apparatus for controlling the temperature of a substrate surface | Hideaki Sakurai, Akitoshi Kumagae, Iwao Higashikawa, Shinichi Ito, Katsuya Okumura | 2002-11-19 |
| 6351006 | Ferroelectric capacitor with means to prevent deterioration | Koji Yamakawa, Osamu Arisumi, Katsuhiko Hieda, Hideyuki Kanai | 2002-02-26 |