Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495054 | Etching method and cleaning method of chemical vapor growth apparatus | Kazuhiro Eguchi, Katsuya Okumura, Masahiro Kiyotoshi, Soichi Yamazaki | 2002-12-17 |
| 6482714 | Semiconductor device and method of manufacturing the same | Kyoichi Suguro | 2002-11-19 |
| 6403997 | Method for manufacturing semiconductor devices | Seiji Inumiya, Tetsuo Matsuda, Yoshio Ozawa | 2002-06-11 |
| 6388282 | Semiconductor memory device and method of manufacture the same | — | 2002-05-14 |
| 6373085 | Semiconductor memory cell having two epitaxial layers and its manufacturing method | — | 2002-04-16 |
| 6351006 | Ferroelectric capacitor with means to prevent deterioration | Koji Yamakawa, Osamu Arisumi, Tsunetoshi Arikado, Hideyuki Kanai | 2002-02-26 |
| 6335241 | Semiconductor device and manufacturing method thereof | Soichi Yamazaki, Kazuhiro Eguchi, Kyoichi Suguro | 2002-01-01 |