Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495054 | Etching method and cleaning method of chemical vapor growth apparatus | Katsuya Okumura, Masahiro Kiyotoshi, Katsuhiko Hieda, Soichi Yamazaki | 2002-12-17 |
| 6335241 | Semiconductor device and manufacturing method thereof | Katsuhiko Hieda, Soichi Yamazaki, Kyoichi Suguro | 2002-01-01 |