Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482714 | Semiconductor device and method of manufacturing the same | Katsuhiko Hieda | 2002-11-19 |
| 6476454 | Semiconductor device and method of manufacturing the same | — | 2002-11-05 |
| 6465290 | Method of manufacturing a semiconductor device using a polymer film pattern | Kouji Matsuo, Atsushi Murakoshi, Yasuhiko Sato, Hiromi Niiyama | 2002-10-15 |
| 6403452 | Ion implantation method and ion implantation equipment | Atsushi Murakoshi | 2002-06-11 |
| 6376888 | Semiconductor device and method of manufacturing the same | Yoshitaka Tsunashima, Atsushi Murakoshi, Kouji Matsuo, Toshihiko Iinuma | 2002-04-23 |
| 6365492 | Apparatus for manufacturing a semiconductor device and a method for manufacturing a semiconductor device | Katsuya Okumura | 2002-04-02 |
| 6346438 | Method of manufacturing a semiconductor device | Atsushi Yagishita, Kouji Matsuo, Yasushi Akasaka, Yoshitaka Tsunashima | 2002-02-12 |
| 6335241 | Semiconductor device and manufacturing method thereof | Katsuhiko Hieda, Soichi Yamazaki, Kazuhiro Eguchi | 2002-01-01 |
| 6335534 | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes | Atsushi Murakoshi, Katsuya Okumura | 2002-01-01 |