Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465290 | Method of manufacturing a semiconductor device using a polymer film pattern | Kyoichi Suguro, Kouji Matsuo, Yasuhiko Sato, Hiromi Niiyama | 2002-10-15 |
| 6403452 | Ion implantation method and ion implantation equipment | Kyoichi Suguro | 2002-06-11 |
| 6376888 | Semiconductor device and method of manufacturing the same | Yoshitaka Tsunashima, Kyoichi Suguro, Kouji Matsuo, Toshihiko Iinuma | 2002-04-23 |
| 6335534 | Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes | Kyoichi Suguro, Katsuya Okumura | 2002-01-01 |