Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6342131 | Method of depositing a multilayer thin film by means of magnetron sputtering which controls the magnetic field | Viraj Y. Sardesai, Tomio Katata, Christopher Parks | 2002-01-29 |