Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462395 | Semiconductor device and method of producing the same | Masatoshi Fukuda, Toshiya Suzuki, Tomio Katata | 2002-10-08 |
| 6368951 | Semiconductor device manufacturing method and semiconductor device | Kazuyuki Higashi, Noriaki Matsunaga, Akihiro Kajita, Tetsuo Matsuda, Tadashi Iijima +5 more | 2002-04-09 |
| 6352931 | Manufacturing method of semiconductor devices by using dry etching technology | Shoji Seta, Makoto Sekine | 2002-03-05 |