Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368951 | Semiconductor device manufacturing method and semiconductor device | Noriaki Matsunaga, Akihiro Kajita, Tetsuo Matsuda, Tadashi Iijima, Hisashi Kaneko +5 more | 2002-04-09 |
| 6342444 | Method of forming diffusion barrier for copper interconnects | Noriaki Matsunaga, Hiroshi Toyoda, Akihiro Kajita, Tetsuo Matsuda, Hisashi Kaneko | 2002-01-29 |