Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368951 | Semiconductor device manufacturing method and semiconductor device | Kazuyuki Higashi, Noriaki Matsunaga, Akihiro Kajita, Tetsuo Matsuda, Hisashi Kaneko +5 more | 2002-04-09 |
| 6348402 | Method of manufacturing a copper interconnect | Takashi Kawanoue, Tetsuo Matsuda, Hisashi Kaneko | 2002-02-19 |