Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6344414 | Chemical-mechanical polishing system having a bi-material wafer backing film assembly | Fen F. Jamin, Bradley P. Jones, Michael F. Lofaro | 2002-02-05 |
| 6340325 | Polishing pad grooving method and apparatus | Shyng-Tsong Chen, Alex Siu Keung Chung, Oscar K. Hsu, Kenneth P. Rodbell | 2002-01-22 |