Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383066 | Multilayered polishing pad, method for fabricating, and use thereof | Shyng-Tsong Chen, Alex Siu Keung Chung, Kenneth P. Rodbell, Jean Vangsness | 2002-05-07 |
| 6340325 | Polishing pad grooving method and apparatus | Shyng-Tsong Chen, Alex Siu Keung Chung, Kenneth M. Davis, Kenneth P. Rodbell | 2002-01-22 |