Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383066 | Multilayered polishing pad, method for fabricating, and use thereof | Shyng-Tsong Chen, Alex Siu Keung Chung, Oscar K. Hsu, Kenneth P. Rodbell | 2002-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383066 | Multilayered polishing pad, method for fabricating, and use thereof | Shyng-Tsong Chen, Alex Siu Keung Chung, Oscar K. Hsu, Kenneth P. Rodbell | 2002-05-07 |