Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455369 | Method for fabricating a trench capacitor | Matthias Forster, Jorn Lutzen, Anja Morgenschweis | 2002-09-24 |
| 6437387 | Memory cell with a stacked capacitor | — | 2002-08-20 |
| 6420099 | Tungsten hard mask for dry etching aluminum-containing layers | Satish D. Athavale | 2002-07-16 |